Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837110 | Substrate processing apparatus and method for processing a substrate | Kaoru Sato | 2020-11-17 |
| 10549305 | Support structure for suspended injector and substrate processing apparatus using same | Yuya Sasaki, Yasushi Takeuchi | 2020-02-04 |