Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10795268 | Method and apparatus for measuring overlay errors using overlay measurement patterns | — | 2020-10-06 |
| 10755405 | Method and system for diagnosing a semiconductor wafer | Jun Liu | 2020-08-25 |
| 10663633 | Aperture design and methods thereof | Hung-Chih Hsieh, Kai-Chiang Wu, Kai-Hsiung Chen, Po-Chung Cheng, Chih-Ming Ke | 2020-05-26 |