Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866524 | Method and system for overlay control | Yang-Hung Chang, Kai-Hsiung Chen | 2020-12-15 |
| 10867116 | Forecasting wafer defects using frequency domain analysis | Yang-Hung Chang, Che-Yuan Sun, Chun-Ming Hu | 2020-12-15 |
| 10684556 | Noise reduction for overlay control | Weimin Hu, Yang-Hung Chang, Kai-Hsiung Chen, Chun-Ming Hu | 2020-06-16 |
| 10663633 | Aperture design and methods thereof | Hung-Chih Hsieh, Kai-Chiang Wu, Yen-Liang Chen, Kai-Hsiung Chen, Po-Chung Cheng | 2020-05-26 |