Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866524 | Method and system for overlay control | Yang-Hung Chang, Chih-Ming Ke | 2020-12-15 |
| 10867933 | Method for forming semiconductor device structure with overlay grating | Long Chen, Jia-Hong Chu, Chi-Wen Lai, Chia-Ching Liang, Yu-Ching Wang +4 more | 2020-12-15 |
| 10734325 | Method for forming semiconductor device structure with overlay grating | Long Chen, Jia-Hong Chu, Chi-Wen Lai, Chia-Ching Liang, Yu-Ching Wang +4 more | 2020-08-04 |
| 10684556 | Noise reduction for overlay control | Weimin Hu, Yang-Hung Chang, Chun-Ming Hu, Chih-Ming Ke | 2020-06-16 |
| 10663633 | Aperture design and methods thereof | Hung-Chih Hsieh, Kai-Chiang Wu, Yen-Liang Chen, Po-Chung Cheng, Chih-Ming Ke | 2020-05-26 |