Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866524 | Method and system for overlay control | Chih-Ming Ke, Kai-Hsiung Chen | 2020-12-15 |
| 10867116 | Forecasting wafer defects using frequency domain analysis | Che-Yuan Sun, Chih-Ming Ke, Chun-Ming Hu | 2020-12-15 |
| 10684556 | Noise reduction for overlay control | Weimin Hu, Kai-Hsiung Chen, Chun-Ming Hu, Chih-Ming Ke | 2020-06-16 |