Issued Patents 2020
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859904 | Halftone phase shift photomask blank, making method, and halftone phase shift photomask | Takuro Kosaka, Hideo Kaneko | 2020-12-08 |
| 10809611 | Method for preparing halftone phase shift mask blank, halftone phase shift mask blank, halftone phase shift mask, and thin film forming apparatus | — | 2020-10-20 |
| 10788747 | Photomask blank and method for producing photomask | Kouhei Sasamoto, Naoki Matsuhashi | 2020-09-29 |
| 10782609 | Photomask blank and photomask | Ryoken OZAWA, Takuro Kosaka | 2020-09-22 |
| 10782608 | Method for preparing photomask blank, photomask blank, method for preparing photomask, photomask, and metallic chromium target | Kouhei Sasamoto, Tsutomu Yuri | 2020-09-22 |
| 10747098 | Halftone phase shift photomask blank | Souichi Fukaya | 2020-08-18 |
| 10712654 | Photomask blank | Souichi Fukaya | 2020-07-14 |
| 10678125 | Photomask blank and method for preparing photomask | Takuro Kosaka, Hideo Kaneko | 2020-06-09 |
| 10670957 | Halftone phase shift photomask blank, making method, and halftone phase shift photomask | Takuro Kosaka, Hideo Kaneko | 2020-06-02 |
| 10656516 | Photomask blank, and preparation method thereof | Takuro Kosaka | 2020-05-19 |
| 10585345 | Photomask blank, method for manufacturing photomask, and mask pattern formation method | Shigeo Irie, Takashi Yoshii, Keiichi Masunaga, Hideo Kaneko, Toyohisa Sakurada | 2020-03-10 |
| 10564537 | Photomask blank, and preparation method thereof | Takuro Kosaka | 2020-02-18 |
| 10545401 | Phase shift mask blank, phase shift mask, and blank preparing method | Takuro Kosaka | 2020-01-28 |