Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859904 | Halftone phase shift photomask blank, making method, and halftone phase shift photomask | Yukio Inazuki, Hideo Kaneko | 2020-12-08 |
| 10782609 | Photomask blank and photomask | Ryoken OZAWA, Yukio Inazuki | 2020-09-22 |
| 10678125 | Photomask blank and method for preparing photomask | Yukio Inazuki, Hideo Kaneko | 2020-06-09 |
| 10670957 | Halftone phase shift photomask blank, making method, and halftone phase shift photomask | Yukio Inazuki, Hideo Kaneko | 2020-06-02 |
| 10656516 | Photomask blank, and preparation method thereof | Yukio Inazuki | 2020-05-19 |
| 10564537 | Photomask blank, and preparation method thereof | Yukio Inazuki | 2020-02-18 |
| 10545401 | Phase shift mask blank, phase shift mask, and blank preparing method | Yukio Inazuki | 2020-01-28 |