Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859904 | Halftone phase shift photomask blank, making method, and halftone phase shift photomask | Takuro Kosaka, Yukio Inazuki | 2020-12-08 |
| 10678125 | Photomask blank and method for preparing photomask | Takuro Kosaka, Yukio Inazuki | 2020-06-09 |
| 10670957 | Halftone phase shift photomask blank, making method, and halftone phase shift photomask | Takuro Kosaka, Yukio Inazuki | 2020-06-02 |
| 10585345 | Photomask blank, method for manufacturing photomask, and mask pattern formation method | Shigeo Irie, Takashi Yoshii, Keiichi Masunaga, Yukio Inazuki, Toyohisa Sakurada | 2020-03-10 |