Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10585345 | Photomask blank, method for manufacturing photomask, and mask pattern formation method | Shigeo Irie, Keiichi Masunaga, Yukio Inazuki, Hideo Kaneko, Toyohisa Sakurada | 2020-03-10 |