Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861724 | Substrate inspection apparatus and substrate processing system including the same | Jongwoo Sun, Hakyoung Kim, Wonyoung Jee | 2020-12-08 |
| 10854485 | Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same | Minsung Kim, Myoung Soo Park, Dongyun Yeo, Dougyong Sung, Suho LEE | 2020-12-01 |
| 10566221 | Apparatus for transferring substrate and apparatus for processing substrate including the same | Hyun Sun Choi, Taekyun Kang | 2020-02-18 |