Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854485 | Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same | Minsung Kim, Myoung Soo Park, Dougyong Sung, Suho LEE, Yun-Kwang Jeon | 2020-12-01 |