Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854485 | Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same | Minsung Kim, Myoung Soo Park, Dongyun Yeo, Suho LEE, Yun-Kwang Jeon | 2020-12-01 |
| 10622217 | Method of plasma etching and method of fabricating semiconductor device using the same | Hoyong Park, Namjun Kang, Seungbo Shim, Junghyun Cho, Myungsun Choi | 2020-04-14 |