Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622217 | Method of plasma etching and method of fabricating semiconductor device using the same | Hoyong Park, Namjun Kang, Dougyong Sung, Junghyun Cho, Myungsun Choi | 2020-04-14 |