Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861724 | Substrate inspection apparatus and substrate processing system including the same | Hakyoung Kim, Yun-Kwang Jeon, Wonyoung Jee | 2020-12-08 |
| 10643858 | Method of etching substrate | Eunwoo Lee, Sangrok Oh, Jungmo Sung | 2020-05-05 |