Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861724 | Substrate inspection apparatus and substrate processing system including the same | Jongwoo Sun, Hakyoung Kim, Yun-Kwang Jeon | 2020-12-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861724 | Substrate inspection apparatus and substrate processing system including the same | Jongwoo Sun, Hakyoung Kim, Yun-Kwang Jeon | 2020-12-08 |