Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629467 | Electrostatic chuck and plasma apparatus for processing substrates having the same | Ohyung Kwon, Kyung-Sun Kim, Jae Hoon Kim | 2020-04-21 |
| 10566176 | Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system | Se Jin Oh, Woong Ko, Vasily Pashkovskiy, Ki Ho Hwang | 2020-02-18 |