Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629467 | Electrostatic chuck and plasma apparatus for processing substrates having the same | Kyung-Sun Kim, Jae Hoon Kim, Doug Yong Sung | 2020-04-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629467 | Electrostatic chuck and plasma apparatus for processing substrates having the same | Kyung-Sun Kim, Jae Hoon Kim, Doug Yong Sung | 2020-04-21 |