Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804120 | Temperature controller and a plasma-processing apparatus including the same | Seong-Moon Ha, Min Kyu Sung, Seung Hee Cho, Seong-Chul Choi, Sang Ho Lee | 2020-10-13 |
| 10629467 | Electrostatic chuck and plasma apparatus for processing substrates having the same | Ohyung Kwon, Jae Hoon Kim, Doug Yong Sung | 2020-04-21 |