Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804120 | Temperature controller and a plasma-processing apparatus including the same | Seong-Moon Ha, Min Kyu Sung, Seong-Chul Choi, Kyung-Sun Kim, Sang Ho Lee | 2020-10-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804120 | Temperature controller and a plasma-processing apparatus including the same | Seong-Moon Ha, Min Kyu Sung, Seong-Chul Choi, Kyung-Sun Kim, Sang Ho Lee | 2020-10-13 |