Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10566176 | Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system | Woong Ko, Vasily Pashkovskiy, Doug Yong Sung, Ki Ho Hwang | 2020-02-18 |