Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10767814 | Pressure vessel equipped with permeated gas discharging structure | Jae Han Chung, Hyun Lee, Gye Hyoung YOO, Seok Heo, Jong Lyul Kim | 2020-09-08 |
| 10566176 | Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system | Se Jin Oh, Woong Ko, Vasily Pashkovskiy, Doug Yong Sung | 2020-02-18 |