Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859519 | Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS) | David A. Reed, Bruno W. Schueler, Rodney Smedt, Jeffrey T. Fanton | 2020-12-08 |
| 10648802 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Wei Ti Lee, Lawrence V. Bot, Michael Kwan, Mark Klare, Charles Thomas Larson | 2020-05-12 |
| 10533961 | Method and system for non-destructive metrology of thin layers | Wei Ti Lee, Mark Klare, Cornel Bozdog | 2020-01-14 |