Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10801978 | XPS metrology for process control in selective deposition | Kavita Shah, Wei Ti Lee | 2020-10-13 |
| 10648802 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Heath A. Pois, Wei Ti Lee, Lawrence V. Bot, Michael Kwan, Mark Klare | 2020-05-12 |