Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10801978 | XPS metrology for process control in selective deposition | Charles Thomas Larson, Kavita Shah | 2020-10-13 |
| 10648802 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Heath A. Pois, Lawrence V. Bot, Michael Kwan, Mark Klare, Charles Thomas Larson | 2020-05-12 |
| 10533961 | Method and system for non-destructive metrology of thin layers | Heath A. Pois, Mark Klare, Cornel Bozdog | 2020-01-14 |