Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859519 | Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS) | Heath A. Pois, David A. Reed, Bruno W. Schueler, Rodney Smedt | 2020-12-08 |
| 10746530 | Optical metrology device for measuring samples having thin or thick films | — | 2020-08-18 |