Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859519 | Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS) | Heath A. Pois, David A. Reed, Rodney Smedt, Jeffrey T. Fanton | 2020-12-08 |
| 10636644 | Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry | David A. Reed, Bruce H. Newcome, Rodney Smedt, Chris Bevis | 2020-04-28 |