Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10760158 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2020-09-01 |
| 10580654 | Feature fill with multi-stage nucleation inhibition | Deqi Wang, Raashina Humayun, Michal Danek | 2020-03-03 |
| 10580695 | Feature fill with nucleation inhibition | Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang | 2020-03-03 |
| 10566211 | Continuous and pulsed RF plasma for etching metals | Madhu Santosh Kumar Mutyala | 2020-02-18 |