Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879087 | Substrate treatment apparatus and manufacturing method of semiconductor device | Yasuhito Yoshimizu, Fuyuma Ito, Hakuba Kitagawa | 2020-12-29 |
| 10529588 | Substrate treatment method and substrate treatment apparatus | Hiroshi Tomita, Hisashi Okuchi, Yasuhito Yoshimizu, Hiroaki Yamada | 2020-01-07 |