Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777391 | 3D printed chamber components configured for lower film stress and lower operating temperature | Kadthala Ramaya Narendrnath, Govinda Raj, Goichi Yoshidome, Bopanna Ichettira VASANTHA | 2020-09-15 |
| 10626500 | Showerhead design | Kartik Shah, Chaitanya A. PRASAD, Kevin Joseph Bautista, Jeffrey Tobin, Lara Hawrylchak | 2020-04-21 |