Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845232 | Mass flow controller, apparatus for manufacturing semiconductor device, and method for maintenance thereof | Sangkil Lee, Yusin Yang, Q-Han Park, Hyun-Deok Lee | 2020-11-24 |
| 10593032 | Defect inspection method and defect inspection apparatus | Joon-Seo Song, Yu-Sin Yang, Chung-Sam Jun, Yun-Jung Jee | 2020-03-17 |
| 10585115 | Scanning probe inspector | Duck Mahn Oh, Young-Hoon Sohn, Chung-Sam Jun, Yun-Jung Jee | 2020-03-10 |
| 10551326 | Method for measuring semiconductor device | Hyo Hyeong Kang, Kang-Woong Ko, Gil-woo Song, Jae Hyung AHN, Chul Hyung Yoo +4 more | 2020-02-04 |