Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784086 | Cobalt etch back | Jialing Yang, Baosuo Zhou, Thorsten Lill, John Hoang | 2020-09-22 |
| 10658161 | Method and apparatus for reducing particle defects in plasma etch chambers | Xikun Wang, Andrew Nguyen, Changhun Lee, Xiaoming He | 2020-05-19 |