Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870575 | Stressed decoupled micro-electro-mechanical system sensor | Horst Theuss, Thoralf Kautzsch, Mirko Vogt, Maik Stegemann, Andre Roeth +4 more | 2020-12-22 |
| 10829368 | MEMS device and method of manufacturing a MEMS device | Alfons Dehe, Stephan Pindl, Carsten Ahrens | 2020-11-10 |