Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870575 | Stressed decoupled micro-electro-mechanical system sensor | Horst Theuss, Bernhard Knott, Thoralf Kautzsch, Mirko Vogt, Maik Stegemann +4 more | 2020-12-22 |
| 10843916 | Mechanical stress decoupling for microelectromechanical systems (MEMS) elements with gel-filling | Dirk Meinhold, Florian BRANDL, Robert Gruenberger, Sebastian Luber, Roland Meier +1 more | 2020-11-24 |
| 10807862 | Segmented stress decoupling via frontside trenching | Florian BRANDL, Robert Gruenberger | 2020-10-20 |