Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10858245 | Deposition of protective material at wafer level in front end for early stage particle and moisture protection | Manfred Fries, Franz-Peter Kalz | 2020-12-08 |
| 10843916 | Mechanical stress decoupling for microelectromechanical systems (MEMS) elements with gel-filling | Dirk Meinhold, Robert Gruenberger, Wolfram Langheinrich, Sebastian Luber, Roland Meier +1 more | 2020-11-24 |
| 10807862 | Segmented stress decoupling via frontside trenching | Robert Gruenberger, Wolfram Langheinrich | 2020-10-20 |