Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10699945 | Back end of line integration for interconnects | Cornelius Brown Peethala, Raghuveer R. Patlolla, Chih-Chao Yang | 2020-06-30 |
| 10615116 | Surface nitridation in metal interconnects | Lawrence A. Clevenger, Terry A. Spooner, Wei Wang, Chih-Chao Yang | 2020-04-07 |
| 10546774 | Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more | 2020-01-28 |
| 10529569 | Self aligned pattern formation post spacer etchback in tight pitch configurations | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Nelson Felix, Sivananda K. Kanakasabapathy +2 more | 2020-01-07 |
| 10529621 | Modulating the microstructure of metallic interconnect structures | Michael Rizzolo, Chih-Chao Yang | 2020-01-07 |