Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861986 | Photoactive devices and materials | Hannu Huotari | 2020-12-08 |
| 10699899 | Atomic layer deposition of antimony oxide films | Raija H. Matero, Linda Lindroos, Hessel Sprey, Jan Willem Maes, David Kurt de Roest +3 more | 2020-06-30 |
| 10662534 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2020-05-26 |
| 10662533 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2020-05-26 |
| 10665425 | Atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2020-05-26 |
| 10643925 | Fluorine-containing conductive films | Linda Lindroos, Hannu Huotari | 2020-05-05 |
| 10553440 | Methods for depositing nickel films and for making nickel silicide and nickel germanide | Viljami Pore, Suvi Haukka, Eva Tois | 2020-02-04 |
| 10529563 | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures | Chiyu Zhu | 2020-01-07 |