Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10814349 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2020-10-27 |
| 10695794 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2020-06-30 |
| 10662533 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2020-05-26 |
| 10662534 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2020-05-26 |
| 10665425 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2020-05-26 |