Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10720335 | Chemistries for TSV/MEMS/power device etching | Peng Shen, Christian Dussarrat, Curtis Anderson, Rahul Gupta, Vincent M. Omarjee | 2020-07-21 |
| 10629451 | Method to improve profile control during selective etching of silicon nitride spacers | Xiangyu Guo, James Royer, Venkateswara R. Pallem | 2020-04-21 |
| 10607850 | Iodine-containing compounds for etching semiconductor structures | Vijay Surla, Rahul Gupta, Hui SUN, Venkateswara R. Pallem, Fabrizio Marchegiani +2 more | 2020-03-31 |
| 10529581 | SiN selective etch to SiO2 with non-plasma dry process for 3D NAND device applications | Chih-Yu Hsu, Peng Shen, Takashi TERAMOTO, Jiro Yokota | 2020-01-07 |