Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607850 | Iodine-containing compounds for etching semiconductor structures | Rahul Gupta, Hui SUN, Venkateswara R. Pallem, Nathan Stafford, Fabrizio Marchegiani +2 more | 2020-03-31 |