Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629451 | Method to improve profile control during selective etching of silicon nitride spacers | Xiangyu Guo, James Royer, Nathan Stafford | 2020-04-21 |
| 10607850 | Iodine-containing compounds for etching semiconductor structures | Vijay Surla, Rahul Gupta, Hui SUN, Nathan Stafford, Fabrizio Marchegiani +2 more | 2020-03-31 |