Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10873070 | Method and apparatus for liquefied gas solvent delivery for electrochemical devices | Cyrus S. Rustomji, Jungwoo Lee | 2020-12-22 |
| 10629451 | Method to improve profile control during selective etching of silicon nitride spacers | Xiangyu Guo, Venkateswara R. Pallem, Nathan Stafford | 2020-04-21 |
| 10607850 | Iodine-containing compounds for etching semiconductor structures | Vijay Surla, Rahul Gupta, Hui SUN, Venkateswara R. Pallem, Nathan Stafford +2 more | 2020-03-31 |