Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10720335 | Chemistries for TSV/MEMS/power device etching | Peng Shen, Christian Dussarrat, Curtis Anderson, Rahul Gupta, Nathan Stafford | 2020-07-21 |
| 10607850 | Iodine-containing compounds for etching semiconductor structures | Vijay Surla, Rahul Gupta, Hui SUN, Venkateswara R. Pallem, Nathan Stafford +2 more | 2020-03-31 |