Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510514 | Gas supply mechanism and semiconductor manufacturing apparatus | Yuki Hosaka, Mayo UDA, Takashi Kubo | 2019-12-17 |
| 10204766 | Ion beam irradiation apparatus and substrate processing apparatus | Mitsunori Ohata, Shinji Nagamachi, Kenichi Shimono | 2019-02-12 |
| 10192774 | Temperature control device for processing target object and method of selectively etching nitride film from multilayer film | Yuki Hosaka, Toshiki Nakajima, Koichi Nagakura | 2019-01-29 |