Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510514 | Gas supply mechanism and semiconductor manufacturing apparatus | Yuki Hosaka, Yoshihiro Umezawa, Takashi Kubo | 2019-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510514 | Gas supply mechanism and semiconductor manufacturing apparatus | Yuki Hosaka, Yoshihiro Umezawa, Takashi Kubo | 2019-12-17 |