Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510514 | Gas supply mechanism and semiconductor manufacturing apparatus | Yoshihiro Umezawa, Mayo UDA, Takashi Kubo | 2019-12-17 |
| 10192774 | Temperature control device for processing target object and method of selectively etching nitride film from multilayer film | Yoshihiro Umezawa, Toshiki Nakajima, Koichi Nagakura | 2019-01-29 |