Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10192774 | Temperature control device for processing target object and method of selectively etching nitride film from multilayer film | Yuki Hosaka, Yoshihiro Umezawa, Koichi Nagakura | 2019-01-29 |