Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10204766 | Ion beam irradiation apparatus and substrate processing apparatus | Yoshihiro Umezawa, Mitsunori Ohata, Kenichi Shimono | 2019-02-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10204766 | Ion beam irradiation apparatus and substrate processing apparatus | Yoshihiro Umezawa, Mitsunori Ohata, Kenichi Shimono | 2019-02-12 |