Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10217933 | Method for etching multilayer film | Eiichi Nishimura | 2019-02-26 |
| 10204766 | Ion beam irradiation apparatus and substrate processing apparatus | Yoshihiro Umezawa, Shinji Nagamachi, Kenichi Shimono | 2019-02-12 |