Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10236162 | Method of etching porous film | Shigeru Tahara, Mikhail Baklanov, Liping Zhang, Jean-Francois de Marneffe | 2019-03-19 |
| 10217933 | Method for etching multilayer film | Mitsunori Ohata | 2019-02-26 |