Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468237 | Substrate processing apparatus | Atsushi Gomi, Shinji Furukawa, Koji Maeda, Masamichi Hara, Naoyuki Suzuki +2 more | 2019-11-05 |
| 10392688 | Film forming apparatus | Junichi Takei, Naoyuki Suzuki | 2019-08-27 |
| 10325801 | Mounting table system, substrate processing apparatus, and temperature control method | Tadashi Mitsunaga, Tatsuo Hatano, Naoki Watanabe | 2019-06-18 |